JPH029254B2 - - Google Patents
Info
- Publication number
- JPH029254B2 JPH029254B2 JP15893584A JP15893584A JPH029254B2 JP H029254 B2 JPH029254 B2 JP H029254B2 JP 15893584 A JP15893584 A JP 15893584A JP 15893584 A JP15893584 A JP 15893584A JP H029254 B2 JPH029254 B2 JP H029254B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- frame
- frame material
- hollow part
- filter frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 21
- 238000007664 blowing Methods 0.000 claims description 11
- 239000011800 void material Substances 0.000 claims 1
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15893584A JPS6138615A (ja) | 1984-07-31 | 1984-07-31 | 全面層流型クリ−ンル−ムの天井吊設フイルタ−システムに於けるフイルタ−フレ−ムから清浄空気を流す装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15893584A JPS6138615A (ja) | 1984-07-31 | 1984-07-31 | 全面層流型クリ−ンル−ムの天井吊設フイルタ−システムに於けるフイルタ−フレ−ムから清浄空気を流す装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6138615A JPS6138615A (ja) | 1986-02-24 |
| JPH029254B2 true JPH029254B2 (en]) | 1990-03-01 |
Family
ID=15682551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15893584A Granted JPS6138615A (ja) | 1984-07-31 | 1984-07-31 | 全面層流型クリ−ンル−ムの天井吊設フイルタ−システムに於けるフイルタ−フレ−ムから清浄空気を流す装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6138615A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0633300Y2 (ja) * | 1986-10-02 | 1994-08-31 | 株式会社竹中工務店 | 全面層流クリ−ンル−ム |
| JPH01170762U (en]) * | 1988-05-16 | 1989-12-04 | ||
| GB9421303D0 (en) * | 1994-10-22 | 1994-12-07 | Howorth Airtech Ltd | Clean air system |
-
1984
- 1984-07-31 JP JP15893584A patent/JPS6138615A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138615A (ja) | 1986-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |